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Journal Articles Microelectronic Engineering Year : 2016

Electrical properties of self-aligned gate-all-around polycrystalline silicon nanowires field effect transistors

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hal-01240772 , version 1 (22-01-2016)

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Brice Le Borgne, Anne-Claire Salaün, Laurent Pichon. Electrical properties of self-aligned gate-all-around polycrystalline silicon nanowires field effect transistors. Microelectronic Engineering, 2016, 150, pp.32-38. ⟨10.1016/j.mee.2015.11.001⟩. ⟨hal-01240772⟩
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