μ-Si strain gauge array on flexible substrate for dynamic pressure measurement
Résumé
Low Temperature μ-Si layers have been deposited by Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) to produce strain gauges. These strain gauges performed on 25 μm thick flexible Kapton Polyimide (PI) were investigated in terms of Gauge Factor but also in dynamic mode through a homemade pneumatic test bench. Best strain gauge design has been identified and subsequently used to perform a 25 sensor array which was also tested using pulses and more complex signals. A simulation of blood pressure monitoring was performed to demonstrate the value of the technology.
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Garcia%20Castro%20et%20al-2020-%C2%B5-Si%20Strain%20Gauge%20Array%20on%20Flexible%20Substrate%20for%20Dynamic%20Pressure%20Measurement.pdf (46.82 Ko)
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document (46.82 Ko)
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Origine : Fichiers produits par l'(les) auteur(s)
Origine : Fichiers produits par l'(les) auteur(s)