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Communication Dans Un Congrès Année : 2016

Integrated Racetrack Mocro-Resonator Based On Porous Silicon Ridge Waveguides

Résumé

Racetrack micro-resonator (MR), made from partially or totally oxidized porous silicon (PS) ridge waveguides fabricated with standard photolithography process, is reported. The design and the technological process are described including a study of waveguide dimensions that provide single mode propagation. Scanning electronic microscopy observations and optical characterizations clearly show that the MR based on PS ridge waveguides has been well implemented. As the MRs will be used for sensing application, we also present a preliminary theoretical study of the porous MRs sensitivity. A very promising theoretical sensitivity around 1200 nm/RIU (Refractive Index Unit) has been calculated for such porous racetrack MR.
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Dates et versions

hal-01588488 , version 1 (15-09-2017)

Identifiants

  • HAL Id : hal-01588488 , version 1

Citer

Pauline Girault, Nathalie Lorrain, Luiz Poffo, Jonathan Lemaitre, Mohammed Guendouz, et al.. Integrated Racetrack Mocro-Resonator Based On Porous Silicon Ridge Waveguides. 10th Porous Semiconductors - Science and Technology 2016 Conference (PSST 2016), Mar 2016, Tarragona, Spain. ⟨hal-01588488⟩
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