Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films - Université de Rennes Access content directly
Journal Articles Solid State Sciences Year : 2016

Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films

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hal-01254806 , version 1 (04-02-2016)

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S. Jacq, C. Le Paven, L. Le Gendre, Ratiba Benzerga, François Cheviré, et al.. Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films. Solid State Sciences, 2016, 54, pp.22-29. ⟨10.1016/j.solidstatesciences.2015.12.010⟩. ⟨hal-01254806⟩
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