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Article Dans Une Revue Superlattices and Microstructures Année : 2005

Dynamical behavior of the scanning thermal microscope (SThM) thermal resistive probe studied using Si/SiGe microcoolers

Résumé

We present a simple method for the characterization of the dynamical behavior of the SThM Wollaston wire thermal resistive probe using Si/SiGe microcoolers. Measurements show a time response of about 186 mu s. This value confirms the value found in the literature. Measurements also allow us to determine the total thermal tip-sample contact resistance Z(Th)(C)

Dates et versions

hal-00116282 , version 1 (25-11-2006)

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Y. Ezzahri, L.D. Patino Lopez, Pierre-Olivier Chapuis, S. Dilhaire, Stéphane Grauby, et al.. Dynamical behavior of the scanning thermal microscope (SThM) thermal resistive probe studied using Si/SiGe microcoolers. Superlattices and Microstructures, 2005, 38 (1), pp.69-75. ⟨10.1016/j.spmi.2005.04.005⟩. ⟨hal-00116282⟩
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