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Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization

Claire Le Paven-Thivet , Laurent Le Gendre , Ratiba Benzerga , Yu Lu , Hung Nguyen et al.
International Symposium on Inorganic and Environmental Materials 2013 (ISIEM 2013), Oct 2013, Rennes, France
Conference papers hal-00869754v1

Structural and dielectric characterization of perovskite oxide and oxynitride lanthanum titanium films deposited by reactive sputtering deposition

Claire Le Paven-Thivet , Yu Lu , Hung Nguyen , Ratiba Benzerga , Laurent Le Gendre et al.
19th International Vacuum Congress (IVC-19), Sep 2013, Paris, France
Conference papers hal-00869768v1

Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization

Yu Lu , Claire Le Paven-Thivet , Hung Nguyen , Ratiba Benzerga , Laurent Le Gendre et al.
Crystal Growth & Design, 2013, pp.4852-4858. ⟨10.1021/cg4010196⟩
Journal articles hal-00875068v1