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Development of a SiON-based integrated platform for the blue/near-UV wavelength rangeProceedings of SPIE, the International Society for Optical Engineering, 12148, SPIE; SPIE, pp.7, 2022, Integrated Photonics Platforms II (SPIE Photonics Europe 2022), ⟨10.1117/12.2621759⟩
Proceedings
hal-03964863v1
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