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authFullName_s : Nathalie Verbrugghe

Study of tungsten films deposited by DC sputtering dedicated to integrated heaters

Nathalie Verbrugghe , Didier Fasquelle , Benoit Duponchel , Stephanie Deputier
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2017, 35 (3), pp.10.1116/1.4981786. ⟨10.1116/1.4981786⟩
Journal articles hal-01542758v1