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Assessment of replication fidelity of optical microstructures by hot embossingInternational Journal of Advanced Manufacturing Technology, 2017, 88 (1-4), pp.303--316. ⟨10.1007/s00170-016-8757-3⟩
Journal articles
hal-01479169v1
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Investigations of Capacitively-Coupled Plasmas by Electrostatic Probe Technique30th Symposium on Microelectronics Technology and Devices (SBMicro 2015), Aug 2015, Salvador, Brazil. ⟨10.1109/SBMicro.2015.7298131⟩
Conference papers
hal-01380036v1
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Fresnel Zone Plate Array Fabricated by Maskless Lithography30th Symposium on Microelectronics Technology and Devices (SBMicro 2015), Aug 2015, Salvador, Brazil. ⟨10.1109/SBMicro.2015.7298155⟩
Conference papers
hal-01380029v1
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