@proceedings{bodiou:hal-03964863, TITLE = {{Development of a SiON-based integrated platform for the blue/near-UV wavelength range}}, AUTHOR = {Bodiou, Lo{\"i}c and Kamath, Pramitha and Simon, Jean-Claude and Thual, Monique and Stervinou, Julie and Levallois, Christophe and Charrier, Jo{\"e}l and Trebaol, Stephane}, URL = {https://univ-rennes.hal.science/hal-03964863}, PUBLISHER = {{SPIE}}, SERIES = {Integrated Photonics Platforms II (SPIE Photonics Europe 2022)}, VOLUME = {12148}, PAGES = {7}, YEAR = {2022}, MONTH = May, DOI = {10.1117/12.2621759}, KEYWORDS = {silicon oxynitride ; integrated photonics ; blue wavelength ; near-UV ; microlens fiber}, HAL_ID = {hal-03964863}, HAL_VERSION = {v1}, }