Development of integrated platform based on chalcogenides for sensing applications in the mid-infrared
Résumé
Mid-Infrared (mid-IR) spectral range, spanning from 2 μm to 20 μm, is ideal for chemical sensing using spectroscopy thanks to the presence of vibrational absorption bands of many liquid and gas substances in this wavelength range. Indeed, mid-IR spectroscopy allows simultaneous qualitative and quantitative analysis by, respectively, identifying molecules from their spectral signature and relating the concentrations of different chemical agents to their absorption coefficient according to Beer-Lambert law. In the last years, photonic integrated sensors based on mid-IR spectroscopy have emerged as a cheap, accurate, and compact solution that would enable continuous real-Time on-site diagnostics and monitoring of molecular species without the need to collect samples for off-site measurements. Here, we report the design, processing and characterization of a photonic integrated transducer based on selenide ridge waveguides. Evanescent wave detection of chemical substances in liquid phase (isopropyl alcohol, C3H8O, and acetic acid, C2H4O2, both dissolved in cyclohexane) is presented using their absorption at a wavelength of 7.7 μm. © 2018 SPIE.