%0 Conference Proceedings %T Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz %+ Jet Propulsion Laboratory (JPL) %+ Institut d'Électronique et des Technologies du numéRique (IETR) %A Lee, C. %A Gonzalez-Ovejero, D. %A Alonso-Delpino, M. %A Reck, T. %A Peralta, A. %A Mehdi, I. %A Chattopadhyay, G. %< avec comité de lecture %B 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017 %C Paris, France %8 2017-08-27 %D 2017 %R 10.1109/IRMMW-THz.2017.8066916 %K Antenna arrays %K Antennas %K Batch data processing %K Platelets %K Silicon %K Terahertz waves %K Alignment technique %K Corrugated horn antennas %K Cross-polarization level %K Microfabricated %K Operation frequency %K Return loss %K Horn antennas %Z Computer Science [cs]/Networking and Internet Architecture [cs.NI] %Z Engineering Sciences [physics]/ElectronicsConference papers %X We designed and microfabricated a (2×2) silicon platelet horn antenna at 560 GHz, which is the highest frequency ever among silicon corrugated horn antennas. This was enabled by a silicon compression pin alignment technique of which inaccuracy is less than ± 2 μm in layer-to-layer. The simulation results show that the return loss and gain across the operation frequency of 490-600 GHz are approximately 25 dB and 22 dBi, respectively. The cross-polarization level is below -40 dB. The feature of batch processing will enable us simultaneously to build hundreds or thousands of horn antennas. © 2017 IEEE. %G English %L hal-01671557 %U https://univ-rennes.hal.science/hal-01671557 %~ UNIV-NANTES %~ UNIV-RENNES1 %~ CNRS %~ INSA-RENNES %~ IETR %~ STATS-UR1 %~ CENTRALESUPELEC %~ UR1-HAL %~ UR1-MATH-STIC %~ UR1-UFR-ISTIC %~ TEST-UNIV-RENNES %~ TEST-UR-CSS %~ UNIV-RENNES %~ INSA-GROUPE %~ TEST-HALCNRS %~ UR1-MATH-NUM %~ IETR-SUMIT %~ NANTES-UNIVERSITE %~ UNIV-NANTES-AV2022