%0 Journal Article %T Thermoelectric properties of co-sputtered CoSb3 thin films as a function of stoichiometry %+ Shenzhen University [Shenzhen] %+ Institut des Sciences Chimiques de Rennes (ISCR) %+ Shenzhen Key Laboratory of Sensor Technology %A Zheng, Zhuang-Hao %A Li, Fu %A Li, Feng %A Li, Yin-Zhen %A Fan, Ping %A Luo, Jing-Ting %A Liang, Guang-Xing %A Fan, Bo %A Zhong, Ai-Hua %Z National Natural Science Foundation of China [11604212] %Z Key platform and research projects, Education and Research of Guangdong Province [2015KQNCX139] %Z Basical Research Program of Shenzhen [JCYJ20160307113206388, JCYJ20160422102622085] %< avec comité de lecture %@ 0040-6090 %J Thin Solid Films %I Elsevier %V 632 %P 88-92 %8 2017-06 %D 2017 %R 10.1016/j.tsf.2017.04.044 %K skutterudite CoSb3 %K thermoelectric property %K micro-structure %Z Chemical Sciences/Material chemistry %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Journal articles %X The skutterudite compound CoSb3 exhibits excellent thermoelectric properties for thermoelectric application. The composition plays an important role in affecting the microstructural and thermoelectric behavior of CoSb3, especially in the form of thin film. In this study, the Co-excess and Sb-excess CoSb3 thin films were prepared by radio frequency and direct magnetron co-sputtering technique. It was found that the thin film with excess Co exhibits a significant n-type conduction behavior and transforms to p-type conduction behavior with Sb rich. The X-ray diffraction patterns show that either the Co-excess or Sb-excess samples contain skutterudite CoSb3 and a secondary phase CoSb2. Additionally, Sb can be found in the Sb-excess samples, yet no Co can be observed in the Co-excess samples. %G English %2 https://univ-rennes.hal.science/hal-01542760/document %2 https://univ-rennes.hal.science/hal-01542760/file/Zheng%20et%20al.%20-%20Thermoelectric%20properties%20of%20co-sputtered%20CoSb3%20th.pdf %L hal-01542760 %U https://univ-rennes.hal.science/hal-01542760 %~ UNIV-RENNES1 %~ CNRS %~ INSA-RENNES %~ ENSC-RENNES %~ ISCR %~ STATS-UR1 %~ UR1-SPM %~ INC-CNRS %~ UR1-UFR-SPM %~ UR1-HAL %~ UR1-SDLM %~ TEST-UNIV-RENNES %~ TEST-UR-CSS %~ UNIV-RENNES %~ INSA-GROUPE %~ TEST-HALCNRS %~ UR1-MMS %~ TEST2-HALCNRS