@article{verbrugghe:hal-01542758, TITLE = {{Study of tungsten films deposited by DC sputtering dedicated to integrated heaters}}, AUTHOR = {Verbrugghe, Nathalie and Fasquelle, Didier and Duponchel, Benoit and Deputier, Stephanie}, URL = {https://univ-rennes.hal.science/hal-01542758}, JOURNAL = {{Journal of Vacuum Science \& Technology B Microelectronics and Nanometer Structures}}, PUBLISHER = {{American Vacuum Society (AVS)}}, VOLUME = {35}, NUMBER = {3}, PAGES = {10.1116/1.4981786}, YEAR = {2017}, MONTH = May, DOI = {10.1116/1.4981786}, HAL_ID = {hal-01542758}, HAL_VERSION = {v1}, }