Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments - Université de Rennes Accéder directement au contenu
Article Dans Une Revue Surface and Coatings Technology Année : 2017

Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments

Résumé

WSx/a-C multilayer films with different layer thickness ratios and the modulation period of similar to 50 nm were prepared on monocrystalline silicon substrate by magnetron sputtering method. The morphology, microstructure and composition of the films were characterized by using scanning electron microscopy (SEM), X-ray diffractometry (XRD), energy dispersive X-ray spectroscopy (EDS) and Raman spectroscopy. The surface chemical states under different etching conditions were investigated by X-ray photoelectron spectroscopy (XPS) depth profile technique. The hardness, the adhesion to the substrate and the tribological properties of the films under various test environments were evaluated by means of nano-indentation, scratching tester and ball-on-disk tribometer. The results showed that a WS2 phase with (101) preferential orientation was formed in WSx sublayer and the WC phase was not present at the WSx/a-C interface. The effects of La-C/L-WSx ratio on the microstructure of as-prepared films were negligible while the effects on the mechanical and tribological properties of the film were significant. An increased hardness (the maximum of similar to 2.2 GPa) and a decreased adhesion were found in the multilayer films. The WSx/a-C multilayer films were of the best wear resistance in vacuum (the minimum of 5.7 x 10(-15) m(3) N-1 m(-1)) and exhibited much better tribological properties than a single WSx film in various test environments.

Domaines

Matériaux
Fichier principal
Vignette du fichier
Microstructure and tribological properties of WSx_accepted.pdf (713.99 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01500405 , version 1 (19-06-2017)

Identifiants

Citer

Fang-Er Yang, Ye Lu, Rong Zhang, Xianghua Zhang, Xiao-Hua Zheng. Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments. Surface and Coatings Technology, 2017, 309, pp.187-194. ⟨10.1016/j.surfcoat.2016.11.071⟩. ⟨hal-01500405⟩
74 Consultations
185 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More