%0 Journal Article %T Optical characterization at 7.7 μm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared %+ Fonctions Optiques pour les Technologies de l'informatiON (FOTON) %+ Institut des Sciences Chimiques de Rennes (ISCR) %+ Département Optique (OPT) %A Gutierrez, Aldo %A Baudet, Emeline %A Bodiou, Loïc %A Lemaitre, Jonathan %A Hardy, Isabelle %A Faijan, François %A Bureau, Bruno %A Nazabal, Virginie %A Charrier, Joël %Z 421002, CONACYT, Consejo Nacional de Ciencia y Tecnología %< avec comité de lecture %Z 17543 %@ 1094-4087 %J Optics Express %I Optical Society of America - OSA Publishing %V 24 %N 20 %P 23109-23117 %8 2016-10-03 %D 2016 %R 10.1364/OE.24.023109 %M 27828376 %K Photolithography %K Reactive ion etching %K Waveguides %K Nitrogen oxides %K Magnetron sputtering %K Light propagation %K Infrared devices %K Germanium %K Evanescent fields %K Multi-layered structure %K Mid-infrared wavelength ranges %K Optical characterization %K Evanescent field sensor %K Optical propagation loss %K Integrated optical sensors %K Sensing applications %K rf-Magnetron sputtering %K Ridge waveguides %Z Chemical SciencesJournal articles %X A selenide integrated platform working in the mid-infrared was designed, fabricated and optically characterized at 7.7 μm. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching, ridge waveguides were processed as Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 μm was observed by optical near-field imaging and optical propagation losses of 2.5dB/cm are measured. Limits of detection of 14.2 ppm and 1.6 ppm for methane and nitrous oxide, respectively, could be potentially measured by using this platform as an evanescent field sensor. Hence, these technological, experimental and theoretical results represent a first step towards the development of an integrated optical sensor operating in the mid-infrared wavelength range. © 2016 Optical Society of America. %G English %L hal-01398053 %U https://univ-rennes.hal.science/hal-01398053 %~ INSTITUT-TELECOM %~ UNIV-RENNES1 %~ CNRS %~ INSA-RENNES %~ ENSC-RENNES %~ ENSSAT %~ FOTON %~ TELECOM-BRETAGNE %~ ISCR %~ SCR_VC %~ FOTON_SYSPHOT %~ STATS-UR1 %~ UR1-SPM %~ INC-CNRS %~ UR1-UFR-SPM %~ UR1-HAL %~ UR1-MATH-STIC %~ UR1-SDLM %~ IVER %~ TEST-UNIV-RENNES %~ TEST-UR-CSS %~ IMTA_OPT %~ UNIV-RENNES %~ IMT-ATLANTIQUE %~ INSA-GROUPE %~ INSTITUTS-TELECOM %~ UR1-MATH-NUM %~ UR1-MMS %~ TEST2-HALCNRS