Selenide sputtered films development for MIR environmental sensor
Mots clés
- Environmental sensor
- Germanium
- Environmental detection
- Thin films
- Surface roughness
- Spectroscopic ellipsometry
- Semiconducting selenium compounds
- Refractive index
- Reactive ion etching
- Microsensors
- Atomic force microscopy
- Hydrophobic polymers
- Ridge waveguides
- Single mode propagation
- Radio frequency magnetron sputtering
- Organic molecules
- Optical transducers
- Mid-infrared spectral range
- Magnetron sputtering
- Inductively coupled plasma
- Waveguides

