@article{baudet:hal-01319062, TITLE = {{Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies}}, AUTHOR = {Baudet, E. and Cardinaud, C. and Girard, A. and Rinnert, E. and Michel, Karine and Bureau, B. and Nazabal, Virginie}, URL = {https://univ-rennes.hal.science/hal-01319062}, JOURNAL = {{Journal of Non-Crystalline Solids}}, PUBLISHER = {{Elsevier}}, VOLUME = {444}, PAGES = {64--72}, YEAR = {2016}, MONTH = Jul, DOI = {10.1016/j.jnoncrysol.2016.04.017}, KEYWORDS = {Radio-frequency magnetron sputtering ; Raman spectroscopy ; Structure ; Thin films ; Chalcogenide glass ; X-ray photoelectron spectroscopy}, HAL_ID = {hal-01319062}, HAL_VERSION = {v1}, }