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Article Dans Une Revue Sensor letters Année : 2013

Au-catalyst silicon nanowires synthesized by vapor-liquid-solid technique in a V-shaped groove: applicatiopn for gas sensors

Résumé

Au-catalyst Vapor-Liquid-Solid (VLS) silicon nanowires (SiNWs) with high density are synthesized on heavily doped polysilicon islands patterned on both sidewalls of the <100> oriented silicon substrate V-shaped groove. The resulting SiNWs network permits to interconnect two heavily doped polysilicon islands leading to the formation of a resistor inside the groove. The quantitative dynamic measurements under exposure of this device to a wide range of gas (ammonia) concentration (from 10 ppm to 350 ppm) were carried out and demonstrated the feasibility of highly sensitive SiNWs based resistors used as gas sensors.
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Dates et versions

hal-00956206 , version 1 (06-03-2014)

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Liang Ni, Aurélie Girard, Peng Zhang, Emmanuel Jacques, Regis Rogel, et al.. Au-catalyst silicon nanowires synthesized by vapor-liquid-solid technique in a V-shaped groove: applicatiopn for gas sensors. Sensor letters, 2013, 11 (8), pp.1541-1544. ⟨10.1166/sl.2013.2842⟩. ⟨hal-00956206⟩
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