@inproceedings{lepaventhivet:hal-00869768, TITLE = {{Structural and dielectric characterization of perovskite oxide and oxynitride lanthanum titanium films deposited by reactive sputtering deposition}}, AUTHOR = {Le Paven-Thivet, Claire and Lu, Yu and Nguyen, Hung and Benzerga, Ratiba and Le Gendre, Laurent and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier and Tessier, Franck and Chevir{\'e}, Fran{\c c}ois}, URL = {https://univ-rennes.hal.science/hal-00869768}, BOOKTITLE = {{19th International Vacuum Congress (IVC-19)}}, ADDRESS = {Paris, France}, YEAR = {2013}, MONTH = Sep, HAL_ID = {hal-00869768}, HAL_VERSION = {v1}, }