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Communication Dans Un Congrès Année : 2009

Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers

Bruno Bêche
Etienne Gaviot
  • Fonction : Auteur
  • PersonId : 833839
  • IdRef : 070362556
Christian Godet
Abdelkader Zebda
  • Fonction : Auteur
  • PersonId : 864020
Jérémy Barbé
  • Fonction : Auteur
  • PersonId : 948437
  • IdRef : 178653098
V. Vié
Pascal Panizza
Goulc'Hen Loas
Cyril Hamel
Nolwenn Huby

Résumé

We have designed and realized three integrated photonic families of micro-resonators (MR) on multilayer organic materials. Such so-called 2.5D-MR and 3D-MR structures show off radius values ranging from 40 to 200μm. Both first and second families are especially designed on organic multilayer materials and shaped as ring- and disk-MR organics structures arranged upon (and coupled with) a pair of SU8-organic waveguides. The third family is related to hybrid 3D-MR structures composed of spherical glass-MR coupled to organic waveguides by a Langmuir-Blodgett lipid film about three nanometers in thickness. At first, polymer spin coating, surface plasma treatment and selective UV-lithography processes have been developed to realize 2.5D photonic micro-resonators. Secondly, we have designed and characterized photonic-quadripoles made of 3D-glass-MR arranged upon a pair of SU8 waveguides. Such structures are defined by a 4-ports or 4-waveguides coupled by the spherical glass-MR. We have achieved an evanescent photonic coupling between the 3D-MR and the 4-ports structure. Spectral resonances have been measured for 4-whispering gallery-modes (WGM) into such 3D-structures respectively characterized by a 0.97 nm free spectral range (FSR) and a high quality Q-factor up to 4.104.
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Dates et versions

hal-00652459 , version 1 (15-12-2011)

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Bruno Bêche, Etienne Gaviot, Christian Godet, Abdelkader Zebda, Arnaud Potel, et al.. Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers. SPIE Optics-Optoelectronics, Apr 2009, Prague, Czech Republic. pp.7356, 735606- 1/735606-10, ⟨10.1117/12.820339⟩. ⟨hal-00652459⟩
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