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Article Dans Une Revue Thin Solid Films Année : 2008

Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers

Résumé

Polymer spin coating, surface plasma treatment and selective UV-lithography processes have been developed to realize 2.5D photonic micro-resonators, made of disk- or ring-shaped upper rib waveguides, using common polymers such as SU8 (biphenol A ether glycidyl), PS233 (polymeric silane) and SOG (siloxane Spin on Glass). Both oxygen and argon plasma treatments, applied to PS233 and SOG before spin-coating the SU8, improve substantially the grip of multilayer devices (SU8 / PS233 or SU8 / SOG). Surface energy components derived from contact angle measurements have been used to optimize the processing conditions. In such integrated photonic devices, the both single-electromagnetic-modes called transverse electric (TE00) and transverse magnetic (TM00) have been excited in a SU8 micro-disk, with a single mode propagation strongly localized near the edge of the disk (i.e. the so called whispering gallery modes).

Dates et versions

hal-00652233 , version 1 (15-12-2011)

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Abdelkader Zebda, Lionel Camberlein, Bruno Bêche, Etienne Gaviot, Eric Bêche, et al.. Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers. Thin Solid Films, 2008, 516 (23), pp.8668-8674. ⟨10.1016/j.tsf.2008.04.095⟩. ⟨hal-00652233⟩
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