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Article Dans Une Revue Applied optics Année : 2008

Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50

Weidong Shen
  • Fonction : Auteur
Fabien Grasset
Alain Moréac
Satoru Inoue
  • Fonction : Auteur
  • PersonId : 845653
Jean-Luc Adam
Michel Lequime
Claude Amra

Résumé

Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of Ge15Sb20S65 and Te20As30Se50 chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A CF4 dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.
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Dates et versions

hal-00200880 , version 1 (21-12-2007)

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Virginie Nazabal, Michel Cathelinaud, Weidong Shen, Petr Nemec, Frédéric Charpentier, et al.. Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50. Applied optics, 2008, 47 (13), pp.C114-C123. ⟨10.1364/AO.47.00C114⟩. ⟨hal-00200880⟩
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