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Communication Dans Un Congrès Année : 2002

Arrayed Micro Needles for Mechanical Gene Insertion

Résumé

A novel approach to realize arrays of out of plane micro needles is given. The exterior shape of the micro needles is realized by dry etching using a RIE. The exterior shape is realized in silicon by dry etching using a SF6 and Argon plasma that achieve the progressive etching of the mask composed by silicon nitride and photoresist. The needles realized present an outer diameter of 900 nm for a height of about 7 microns. The needle is then realized by wet oxidation using a thin film of silicon nitride to perform a LOCOS at the end of the needle. The last step consists in selectively etch the Si3N4 and the silicon inside the needle by xenon difluoride.
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Dates et versions

hal-00107288 , version 1 (17-10-2006)

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Gonzalo Cabodevila, Hiroyuki Fujita, Bruno Le Pioufle. Arrayed Micro Needles for Mechanical Gene Insertion. Proceedings of SPIE -- Volume 4937 Biomedical Applications of Micro- and Nanoengineering,, Nov 2002, Melbourne, Australia. pp.90-97, ⟨10.1117/12.473962⟩. ⟨hal-00107288⟩
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