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Article Dans Une Revue Applied Physics Letters Année : 2000

Theory of electrostatic probe microscopy: A simple perturbative approach Electrostatic forces between sharp tips and metallic and dielectric samples

Résumé

A theoretical approach to electrostatic scanning probe microscopy is presented. We show that a simple perturbation formula, originally derived in the context of scattering theory of electromagnetic waves, can be used to obtain the capacitance and the electrostatic force between a metallic tip and an inhomogeneous dielectric sample. For inhomogeneous thin dielectric films, the scanning probe signal is shown to be proportional to the convolution between an effective surface profile and a response function of the microscope. This provides a rigorous framework to address the resolution issue and the inverse problem.
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Dates et versions

hal-01624571 , version 1 (26-10-2017)

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S Gómez-Moñivas, J. Sáenz, R. Carminati, J J Greffet. Theory of electrostatic probe microscopy: A simple perturbative approach Electrostatic forces between sharp tips and metallic and dielectric samples. Applied Physics Letters, 2000, 76 (20), pp.2955-2957 ⟨10.1063/1.126528⟩. ⟨hal-01624571⟩
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