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Communication Dans Un Congrès Année : 2013

Improved MEMS-in-TEM setup for high sensitivity thermal characterization of nanowire using a new TEM cryo-holder

Résumé

Thermal conductivity of diamond-like-carbon nanowire is investigated by combining MEMS in TEM (transmission electron microscope) with a new cryogenic TEM holder allowing in-situ electrical measurements from 90K to 380K. A suspended DLC nanowire of 80nm in diameter and 10mic in length was locally grown by FIB-CVD in between an integrated micro-heater and a temperature sensor. Combined with a special Wheastone bridge configuration, we show drastic improvement of temperature detection on the sensor and estimate the thermal conductance of the DLC nanowire at low temperature in-situ in TEM.
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Dates et versions

hal-00963659 , version 1 (24-03-2014)

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Laurent Jalabert, G. Valet, A. Chorosz, D. Guo, R. Kometani, et al.. Improved MEMS-in-TEM setup for high sensitivity thermal characterization of nanowire using a new TEM cryo-holder. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Mar 2014, Barcelone, Spain. pp.1839, ⟨10.1109/Transducers.2013.6627148⟩. ⟨hal-00963659⟩
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